Which tool I can go for simulating Lithographic process.
I want to give mask shape,minimum feature size and wavelength and see the results.Cn anyone suggest a tool?
Simulations Tools that connect to the Rice cluster will be inoperable due to system upgrades from Tuesday, May 29th, 2018, 8:00am ET to Wednesday May 30, 2018, 5:00pm ET. We apologize for any inconvenience. close