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Can't plot mesh

I use this as an input file but the mesh plotting line at the end keep gives an error
 

title      MOSFET - NMOS

MESH RECT NX=51 NY=51
X.M N=1 LOC=0
X.M N=15 LOC=0.05  RATIO=0.8
X.M N=26 LOC=0.0625 RATIO=1.25
X.M N=36 LOC=0.075 RATIO=0.8
X.M N=51 LOC=0.125 RATIO=1.25

Y.M N=1 LOC=0
Y.M N=25 LOC=0.068 RATIO=0.8
Y.M N=36 LOC=0.0805 RATIO=1.25
Y.M N=46 LOC=0.093 RATIO=0.8
Y.M N=51 LOC=0.0942 RATIO=1.25

# Substrate
REGION NUM=1 ix.l=1 ix.h=51 iy.l=1 iy.h=25 silicon
# Source
REGION NUM=2 ix.l=1 ix.h=15 iy.l=25 iy.h=46 silicon
# Drain
REGION NUM=3 ix.l=36 ix.h=51 iy.l=25 iy.h=46 silicon
# Channel
REGION NUM=4 ix.l=15 ix.h=36 iy.l=25 iy.h=46 silicon
# Gate
REGION NUM=5 ix.l=15 ix.h=36 iy.l=46 iy.h=51 oxide
# Fillers
REGION NUM=6 ix.l=1 ix.h=15 iy.l=46 iy.h=51 oxide
REGION NUM=7 ix.l=36 ix.h=51 iy.l=46 iy.h=51 oxide

ELECT NUM=1 ix.l=1 ix.h=15 iy.l=46 iy.h=46
ELECT NUM=2 ix.l=36 ix.h=51 iy.l=46 iy.h=46
ELECT NUM=3 ix.l=15 ix.h=36 iy.l=51 iy.h=51
ELECT NUM=4 ix.l=1 ix.h=51 iy.l=1 iy.h=1

dop region=2,3 unif conc=1e+20 n.type
dop region=4 unif conc=1e+19 p.type
dop region=1 unif conc=5e+16 p.type
plot.3d doping outfile=doping
contact num=3 n.polysilicon

MODELS TEMP=300 bgn
SYSTEM NEWTON CARR=1 ELECTRONS

solve init outfile=initsol
PLOT.3D POTEN ELECT OUTFILE=equ
# solve for transfer characteristic
solve v2=0 vstep=0.05 nsteps=1 elect=2
solve v2=0.05
log outf=idvg
solve v3=0 vstep=0.1 nsteps=15 elect=3
log off
load infile=initsol
solve v3=0.0 outfile=vgn0
solve v3=0.0 vstep=0.0833333333333 nsteps=6 elect=3
solve v3=0.5 outfile=vgn1
solve v3=0.5 vstep=0.0833333333333 nsteps=6 elect=3
solve v3=1.0 outfile=vgn2
solve v3=1.0 vstep=0.0833333333333 nsteps=6 elect=3
solve v3=1.5 outfile=vgn3
solve v3=1.5 vstep=0.0833333333333 nsteps=6 elect=3
solve v3=2.0 outfile=vgn4

load infile=vgn0
log outfile=idvd
solve v2=0 vstep=0.1 nsteps=20 elect=2

load infile=vgn1
solve v2=0 vstep=0.1 nsteps=20 elect=2

load infile=vgn2
solve v2=0 vstep=0.1 nsteps=20 elect=2

load infile=vgn3
solve v2=0 vstep=0.1 nsteps=20 elect=2

load infile=vgn4
solve v2=0 vstep=0.1 nsteps=20 elect=2
log off
plot.3d pot elect outf=wmc
plot.2d grid outf=mesh
END

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