Interface Trap Density Metrology of State-of-the-Art Undoped Si n-FinFETs

N. Collaert, Gerhard Klimeck, Sven Rogge, Saumitra Mehrotra, S. Biesemans, Sunhee Lee, Abhijeet Paul, Giuseppe Tettamanzi, (2011), "Interface Trap Density Metrology of State-of-the-Art Undoped Si n-FinFETs", Electron Device Letters, IEEE, 32, 4: pg: 440-442, 11, (DOI: 10.1109/LED.2011.2106150 )

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Type
Journal Electron Device Letters
Publisher IEEE
Ref Type R
Date submitted December 24, 2010
Date accepted January 04, 2011
Date published March 23, 2011
Year 2011
Month 11
Volume 32
Issue/Number 4
Pages 440-442
DOI 10.1109/LED.2011.2106150
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