Interface Trap Density Metrology from Sub-Threshold Transport in Highly Scaled Undoped Si n-FinFETs

By: Abhijeet Paul, Giuseppe Tettamanzi, Sunhee Lee, Saumitra Mehrotra, N. Collaert, S. Biesemans, Sven Rogge, G Klimeck
Abhijeet Paul, Giuseppe Tettamanzi, Sunhee Lee, Saumitra Mehrotra, N. Collaert, S. Biesemans, Sven Rogge, G Klimeck, (2011), "Interface Trap Density Metrology from Sub-Threshold Transport in Highly Scaled Undoped Si n-FinFETs", AIP, 12: pg: -, (DOI: ). Cited by:

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Type arXiv
Publisher AIP
Ref Type R
Date submitted February 16, 2011
Year 2011
Month 00
Issue/Number 12
Pages -
Text snippet/Notes {{none}}
Submitted By Swaroop S
Submitted Friday, May 20, 2011 @ 12:00am