Interface Trap Density Metrology from Sub-Threshold Transport in Highly Scaled Undoped Si n-FinFETs

By: Abhijeet Paul, Giuseppe Tettamanzi, Sunhee Lee, Saumitra Mehrotra, N. Collaert, S. Biesemans, Sven Rogge, G Klimeck

About

Type
Publisher AIP
Ref Type R
Date submitted February 16, 2011
Year 2011
Month 00
Issue/Number 12
Pages -
Text snippet/Notes {{none}}