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Equipment

Tegal Corp. Plasmod Plasma Etcher

Equipment home > Biology > Tegal Corp. Plasmod Plasma Etcher

General Information:

Coral Name: N/A
FIC: Shared
Process/Equipment Owner: Sean Rinehart
Location: 2081
Max Wafer Size: N/A

System Information:

General Description:

Bench-top plasma etcher for wafer fabrication - cleans organic residues and oxidizes surfaces

Capabilities:

4" diameter chamber / uses room air for oxygen source

Materials Compatibility:

Cleans organic residues and oxidizes surfaces

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.