Coral Name: N/A
Location: 2031, 2037
Max Wafer Size: 4 in.
Vacuum oven suitable for baking lithography samples, glassware, chemical samples
Operating Features - Capacity: 0.65 cu. ft. (0.02m3)
Dial-in temperatures up to 280°C (536°F)
Maintains 30 in. Hg (762mm) vacuum with less than 1/2 in. Hg (12.7mm) loss per day
Automatic temperature backup control takes over if the temperature rises more than 5°C over setpoint; constancy ±1.0°C at ultimate vacuum; control sensitivity ± 1.0°C; warning light alerts of failure
* Must install Coral and be a trained user to reserve a slot on this system.