General Information:

Coral Name: Heidelberg
Process/Equipment Owner: Mike Courtney
Location: Cleanroom
Max Wafer Size: 9

System Information:

General Description:

The Heidelberg DLW 66fs is a laser writer that can do direct write on wafers or write reticles.

Capabilities:

The systen will have a 1um resolution lens, 375nm laser, autofocus, and backside alignment capability.

Useful Links:

• Equipment Use Fees
• Reserve System Microfabrication Nanotechnology Laboratory

* Must install Coral and be a trained user to reserve a slot on this system.