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Home Groups MEMS and NEMS
  • Discoverability Visible
  • Join Policy Open/Anyone
  • Created 15 Aug 2013

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Welcome to the MEMS and NEMS group! If you are a student or practicing engineer or scientist who wants to learn more about MEMS and NEMS or an instructor looking for materials to use in a course, you can find material here that includes complete courses and seminars on specialized topics.

Much of the material is freely accessible by any visitor, but by joining this group, you can participate in discussions on topics of interest to you, post items to the group wiki or even work on a project with other group members. Additionally, as a group member you may receive notifications about new materials and events of interest to the MEMs and NEMS group members. Adding events to the group calendar is as easy as clicking on “add event”.

You can also contribute substantial resources to nanoHUB through the resource contribution process, and then send a message to the group manager so that links to those resources can be added to this group.

This group contains the following:

Learning Modules

Introduction to Nanofluidics

Taught by Susan Sinnott
Selected Topics: materials science, molecular electronics, nano electro-mechanical systems


NCN NEMS Tutorials

Purdue University
Taught by Various Speakers
There are 6 graduate-level lectures in this series

BNC Annual Research Review— An Introduction to PRISM and MEMS Simulation

Purdue University (2008)
Taught by Jayathi Murthy
Selected Topics: PRISM, MEMS, dielectric charging, micromechanical modeling

Introduction to the CENEMS Simulation Tool

University of Illinois at Urbana-Champaign (2006)
Taught by Gang Li and Narayan Aluru
This Learning Module includes a Breeze Presentation, quiz and homework.

Computational Methods for NEMS

University of Illinois Urbana-Champaign (2004)
Taught by Narayan Aluru and Gang Li
swf presentation and pdf slides



SugarCube is a tool which facilitates the parameterization of ready-made MEMS. Using this tool one can investigate the performance of parameterized MEMS which are available in the form of hierarchical libraries.

SUGARCube Cantilever

Cantilever modeling and simulation with different loads

SUGARCube Tang Resonator

Parametric Tang’s Comb-Drive Modeling and Simulation

SUGARCube ADXL Accelerometer

Modeling and simulationg of ADXL accelerometer

SUGARCube Chevron Thermal Actuator

Modeling and Simulation of a Chevron Thermal Actuator

SUGARCube Netlist Input Tool

Simulate the user input netlist by SUGAR2.0

Comb Drive Levitation

Model comb drive levitation effect with Schwarz-Christoffel based algorithm

Capacitance Modeling Tool

Calculate the capacitance between two conductors that may be represented as simply-connected polygonal geometries in 2.5D with Dirichlet boundary conditions

Q-Factor calculator with Uncertainty Quantification

Calculates squeeze-film damping Q-factors of microcantilevers for arbitrary ambient pressures


Computes the surface charge density distribution on the surface of the conductors in a multiconductor system

Carbon nanotube based NEMS with cantilever structure

Simulates pull-in behavior of Carbon nanotube based NEMS with cantilever boundary conditions, with and without Vander Waal’s effect., a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.