Thermal Microsystems for On-Chip Thermal Engineering
04 Apr 2006 | Online Presentations | Contributor(s): Suresh V. Garimella
Electro-thermal co-design at the micro- and nano-scales is critical for
achieving desired performance and reliability in microelectronic circuits.
Emerging thermal microsystems technologies for this application area are
discussed, with specific examples including a novel micromechanical …