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ECE 695Q: Nanometer Scale Patterning and Processing
11 Jul 2016 | Courses | Contributor(s): Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.
ECE 695Q Lecture 16: Electron Optics and Lithography I
29 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi
ECE 695Q Leture 24: Lecture 24 Nanofabrication with Focused Ion Beams – Ion-Solid Interaction, Damage
ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
21 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi
ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques
17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi
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