1. Nanophotonics (as taught in MIT 2.718/2.719: Photonic Materials, Fall 2012)

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   22 Feb 2013 | Teaching Materials | Contributor(s): Nick Fang

   This course is intended to introduce recent advances in photonics science and technology to undergraduate and graduate students in engineering. The course consists of selected topics in fundamental science of nano-optics, with an overview of nanophotonic tools. Graduate credit requires the …

2. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 27: Nanomanufacturing 2: Optical Nanomanufacturing

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   20 Feb 2010 | Online Presentations | Contributor(s): Nick Fang

   Nanomanufacturing 2: Optical Nanomanufacturing Topics: Three Basic Exposure Methods Photomask and Reticles Positive and Negative Lithography Relationshil Between Mask and Resist Eight Steps to Photolithography Photolithographic Process Positive Photoresists Negative …

3. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 28: Nanomanufacturing 3: Imprint Technology

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   28 Jan 2010 | Online Presentations | Contributor(s): Nick Fang

   Nanomanufacturing 3: Imprint Technology Topics: Imprinting: A Long History Nanoimprinting and Hot Embossing Example of nanoimprint machine Volume Manufacture Large-Scale NIL Examples Step and Flash imprint Lithography(SFIL) Application Example: Security NIL application in …

4. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 27: Optical Methods

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   21 Jan 2010 | Online Presentations | Contributor(s): Nick Fang, Omar Sobh

   Optical Mathods Topics: Photomask and Reticles Positive and Negative Lithography Relationship between Mask and Resist 8 Steps of Photolithography Photolithographic Process Positive Photoresists Negative Photoresists Chemistry of Photo-Crosslinking A simplified Model …

5. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing

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   20 Jan 2010 | Online Presentations | Contributor(s): Nick Fang, Omar Sobh

   Nanomaterials and Devices for Solar Energy Topics: From Si crystals to Wafers From Wafers to Chips Photolithography: Definitions Optical Lithography Multi-Photon Lithography E-Beam Lithography Imprinting Lithography Scanning probe lithography Additive Processes Thermal …

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