Panel Discussion on Nanotechnology Research Beyound 2025
05 Jan 2016 | Online Presentations | Contributor(s): Mark Lundstrom, Roger T. Howe
Birck Nanotechnology Center
Vacuum Nanosystemsfor Energy Conversion
01 Feb 2013 | Online Presentations | Contributor(s): Roger T. Howe
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated the development of low-cost, wafer-scale vacuum encapsulation technologies. In this talk, I’ll identify a promising direction for nanotechnology, in which vacuum is more than simply the ambient surrounding a microstructure, but rather is a critical element in device operation.