MEMS Resonators as an Enabling Technology
07 Aug 2019 | Online Presentations | Contributor(s): Dana Weinstein
GHz CMOS-MEMS Resonators
05 Apr 2018 | Online Presentations | Contributor(s): Dana Weinstein
Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
10 Jun 2014 | Online Presentations | Contributor(s): Dana Weinstein, Luca Daniel, Bichoy W. Bahr
This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes.
RF Solid-State Vibrating Transistors
15 Feb 2014 | Online Presentations | Contributor(s): Dana Weinstein
In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...
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Unreleased 1D CMOS Resonant Body Transistor with MIT Virtual Source (URBT-MVS) Model
23 Apr 2024 | Contributor(s): Bichoy W. Bahr, Dana Weinstein, Luca Daniel
An RBT is a micro-electromechanical (MEM) resonator with a transistor (FET) incorporated into the resonator structure to sense the mechanical vibrations.
Released Resonant Body Transistor (RBT) Model
22 Oct 2014 | Contributor(s): Bichoy W. Bahr, Dana Weinstein, Luca Daniel | doi:10.4231/D3KS6J55W
An RBT is a micro-electromechanical (MEM) resonator with a transistor (FET) incorporated into the resonator structure to sense the mechanical vibrations. The model is aimed to present a deep insight into the physics of the RBT.
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