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[Illinois] Advanced Materials Characterization Workshop 2012: Nanofabrication of Plasmonic Devices in the Helium Ion Microscope
05 Jul 2012 | Online Presentations | Contributor(s): Larry Scipioni
Helium ion microscopy (HIM) is being used both to create and to inspect nanostructures for photonic and plasmonic devices. As part of a program exploring photoelectrons as sources for multiple beam electron beam lithography, fractal apertures are being developed to generate a sub-20nm light...
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