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  • Organization
    Northwestern University

  • Employment Type
    University / College Faculty

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  • Biography

    Chang Liu received his M.S. and Ph.D. degree from the California Institute of Technology in 1991 and 1995, respectively. His Ph.D. thesis was titled “Micromachined sensors and actuators for fluid mechanics applications”. In January 1996, he joined the Microelectronics Laboratory of the University of Illinois as a postdoctoral researcher. In January 1997, he became an Illinois assistant professor with major appointment in the Electrical and Computer Engineering department and minor appointment in the Mechanical and Industrial Engineering Department. In 2003, he was promoted to Associate Professor with tenure. In 2007, he became a full professor with major appointment in Mechanical Engineering department in Northwestern University. He holds joint appointment in Electrical Engineering department. He also serves as the director of the Northwestern University cleanroom – NuFab.


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