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Process Lab: Concentration Dependent Diffusion
09 Oct 2006 | Tools | Contributor(s): Shuqing (Victor) Cao, Yang Liu, Peter Griffin
Simulates the dopant diffusion process in integrated circuit fabrication
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Process Lab: Oxidation
09 Oct 2006 | Tools | Contributor(s): Shuqing (Victor) Cao, Yang Liu, Peter Griffin
Simulates the oxidation process in integrated circuit fabrication
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Process Lab: Oxidation Flux
09 Oct 2006 | Tools | Contributor(s): Shuqing (Victor) Cao, Yang Liu, Peter Griffin
Simulates the oxidation flux in the oxide growth process in integrated circuit fabrication
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Process Lab: Point Defect Coupled Diffusion
09 Oct 2006 | Tools | Contributor(s): Shuqing (Victor) Cao, Yang Liu, Peter Griffin
Simulates the point-defect-coupled diffusion process in integrated circuit fabrication