Double-Clamped Silicon NEMS Resonators Model 1.0.0

By Yanfei Shen1, Scott Calvert1, Jeffrey F. Rhoads1, Saeed Mohammadi1

Purdue University

Micro/Nanoelectromechanical systems (M/NEMS) are gaining great momentum and interest in a variety of
applications, such as high-sensitivity mass sensing, tunable signal filtering and precision timing. They possess
inherently high...

Listed in Compact Models | publication by group NEEDS: Nano-Engineered Electronic Device Simulation Node

Download Bundle

Additional materials available

Version 1.0.0 - published on 07 Mar 2016 doi:10.4231/D37659G7N - cite this

Licensed under NEEDS Modified CMC License according to these terms


This model is built for a silicon-based, double-clamped (source and drain), double-gate beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation through the beam and electrical parasitic elements.

Model Release Components ( Show bundle contents ) Bundle

Cite this work

Researchers should cite this work as follows: