Double-Clamped Silicon NEMS Resonators Model
2016-03-07 16:45:06 | Contributor(s): Yanfei Shen, Scott Calvert, Jeffrey F. Rhoads, Saeed Mohammadi | doi:10.4231/D37659G7N
Micro/Nanoelectromechanical systems (M/NEMS) are gaining great momentum and interest in a variety of
applications, such as high-sensitivity mass sensing, tunable signal filtering and precision timing. They possess
inherently high quality factors and can provide narrow bandwidth...