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Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS

By Narayan Aluru

University of Illinois at Urbana-Champaign

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Researchers should cite this work as follows:

  • Narayan Aluru (2011), "Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS," http://nanohub.org/resources/10683.

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Omar N Sobh

University of Illinois at Urbana-Champaign

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