Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS

By Narayan Aluru

University of Illinois at Urbana-Champaign

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Licensed under Creative Commons BY-NC-SA 3.0.

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Cite this work

Researchers should cite this work as follows:

  • Narayan Aluru (2011), "Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS," https://nanohub.org/resources/10683.

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Submitter

Omar N Sobh

University of Illinois at Urbana-Champaign

Tags

  1. CNST
  2. Illinois
  3. MNTL
  4. Multiscale Analysis
  5. Nano Electro-Mechanical Systems (NEMS)
  6. nanoelectronics
  7. nanofluidics
  8. NEMS/MEMS