Illinois ECE598XL Semiconductor Nanotechnology

By Xiuling Li

University of Illinois at Urbana-Champaign



Published on


Lectures and discussion on current topics of semiconductor nanotechnology building block formation, characterization and device applications. Group IV, III-V and II-VI semiconductor nanowires, nanotubes and related nanophotonic and nanoelectronic device science and technology will be examined, with emphasis on compound semiconductors. The course starts with a brief overview nanotechnology in general then focuses on the synthesis methods of various building blocks, including an in-depth tutorial of applications of epitaxial growth (MOCVD/MBE) in nanostructure growth. The correlation between growth parameter variation with topography, microstructure, defect and impurity incorporations will be discussed. For nanostructure characterization, the focus will be on spatially and time-resolved optical characterization and its correlation with morphological, chemical and electrical properties. The discussion of nano-devices will be application-orientated with categories including energy conversion (photovoltaic, thermoelectric, etc.), light emission and detection (LEDs, lasers, and detectors), IC roadmap, and chemical and biological sensing etc. The course will conclude with discussions on perspectives on nano-device integration and manufacturing. Examples used throughout the lecture and discussions will be dynamic as the frontier of literatures continues to evolve.

Cite this work

Researchers should cite this work as follows:

  • Xiuling Li (2011), "Illinois ECE598XL Semiconductor Nanotechnology,"

    BibTex | EndNote


Omar N Sobh

University of Illinois at Urbana-Champaign


Lecture Number/Topic Online Lecture Video Lecture Notes Supplemental Material Suggested Exercises
Illinois ECE598XL Semiconductor Nanotechnology - 1 - Introduction to Nanotechnology ECE 598XL - Introduction to Nanotechnology
Illinois ECE598XL Semiconductor Nanotechnology - 2 - Nanostructure Epitaxial Growth Techniques ECE 598XL Epi growth techniques
Illinois ECE598XL Semiconductor Nanotechnology - 3 - Quantum Dots: Formation ECE 598XL Quantum Dots Formation