Lectures and discussion on current topics of semiconductor nanotechnology building block formation, characterization and device applications. Group IV, III-V and II-VI semiconductor nanowires, nanotubes and related nanophotonic and nanoelectronic device science and technology will be examined, with emphasis on compound semiconductors. The course starts with a brief overview nanotechnology in general then focuses on the synthesis methods of various building blocks, including an in-depth tutorial of applications of epitaxial growth (MOCVD/MBE) in nanostructure growth. The correlation between growth parameter variation with topography, microstructure, defect and impurity incorporations will be discussed. For nanostructure characterization, the focus will be on spatially and time-resolved optical characterization and its correlation with morphological, chemical and electrical properties. The discussion of nano-devices will be application-orientated with categories including energy conversion (photovoltaic, thermoelectric, etc.), light emission and detection (LEDs, lasers, and detectors), IC roadmap, and chemical and biological sensing etc. The course will conclude with discussions on perspectives on nano-device integration and manufacturing. Examples used throughout the lecture and discussions will be dynamic as the frontier of literatures continues to evolve.
University of Illinois at Urbana-Champaign
Researchers should cite this work as follows:
|Lecture Number/Topic||Online Lecture||Video||Lecture Notes||Supplemental Material||Suggested Exercises|
|Illinois ECE598XL Semiconductor Nanotechnology - 1 - Introduction to Nanotechnology||ECE 598XL - Introduction to Nanotechnology
|Illinois ECE598XL Semiconductor Nanotechnology - 2 - Nanostructure Epitaxial Growth Techniques||ECE 598XL Epi growth techniques
|Illinois ECE598XL Semiconductor Nanotechnology - 3 - Quantum Dots: Formation||ECE 598XL Quantum Dots Formation