Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Researchers should cite this work as follows:
Dragica Vasileska (2011), "Silvaco Athena - Part 1," https://nanohub.org/resources/11814.