Silvaco Athena - Part 1

By Dragica Vasileska

Arizona State University

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Teaching Materials

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Abstract

This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

Cite this work

Researchers should cite this work as follows:

  • Dragica Vasileska (2011), "Silvaco Athena - Part 1," https://nanohub.org/resources/11814.

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Tags

  1. ion implantation
  2. nanoelectronics
  3. processing
  4. process modeling
  5. Silvaco