Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Researchers should cite this work as follows:
Dragica Vasileska (2011), "Silvaco Athena - Part 2," http://nanohub.org/resources/11816.