Silvaco Athena - Part 2
Licensed according to this deed.
Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
Category
Published on
Abstract
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Cite this work
Researchers should cite this work as follows:
-
Dragica Vasileska (2011), "Silvaco Athena - Part 2," https://nanohub.org/resources/11816.