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Silvaco Athena - Part 2

By Dragica Vasileska

Arizona State University

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Abstract

This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

Cite this work

Researchers should cite this work as follows:

  • Dragica Vasileska (2011), "Silvaco Athena - Part 2," http://nanohub.org/resources/11816.

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