Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
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This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Researchers should cite this work as follows:
Dragica Vasileska (2011), "Silvaco Athena - Part 2," https://nanohub.org/resources/11816.