Silvaco Athena - Part 3

By Dragica Vasileska

Arizona State University

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This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

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Researchers should cite this work as follows:

  • Dragica Vasileska (2011), "Silvaco Athena - Part 3,"

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