Silvaco Athena - Part 3

By Dragica Vasileska

Arizona State University

Published on

Abstract

This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

Cite this work

Researchers should cite this work as follows:

  • Dragica Vasileska (2011), "Silvaco Athena - Part 3," https://nanohub.org/resources/11819.

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