Thermal Microsystems for On-Chip Thermal Engineering

By Suresh V. Garimella

Purdue University

Published on


Electro-thermal co-design at the micro- and nano-scales is critical for achieving desired performance and reliability in microelectronic circuits. Emerging thermal microsystems technologies for this application area are discussed, with specific examples including a novel micromechanical electro-hydrodynamic micropump, electrowetting for fluidic actuation and site-specific thermal control, ion-driven airflow, and miniature piezoelectrically actuated cantilevers for cooling and sensing. Fundamental research into enabling technologies for such microsystems, conducted by the speaker’s group under the framework of the National Science Foundation Compact, High-Performance Cooling Technologies Research Center, is presented.

note: There is some audio noise slides 6 through 10.


image Suresh Garimella is a Professor of Mechanical Engineering at Purdue University. He received his PhD from the University of California at Berkeley in 1989. He is Director of the NSF Cooling Technologies Research Center, the Electronics Cooling Laboratory and the Solidification Heat Transfer Laboratory. His research interests include thermal microsystems, high-performance compact cooling technologies, electro-thermal co- design and electronics packaging, micro- and nano-scale thermal phenomena, and materials processing. Dr. Garimella has worked with 21 PhD and 28 MS students and 13 visiting scholars and post-docs, and has co-authored over 200 refereed journal and conference publications, besides editing or contributing to a number of books. He serves on the Editorial Boards of ASME Journal of Heat Transfer and Experimental Heat Transfer, and has served as Editor of Heat Transfer-Recent Contents and on the Editorial Board of Experimental Thermal and Fluid Science. He is a Fellow of the ASME. His efforts in research and engineering education have been recognized with the 2004 ASME Gustus L. Larson Memorial Award; Graduate School/UWM Foundation Research Award in recognition of Outstanding Research and Creative Activity, 1995; UWM Distinguished Teaching Award in recognition of Demonstrated Dedication to Excellence in Undergraduate Instruction, 1997; and Society of Automotive Engineers' Ralph R. Teetor Educational Award, 1992.

Sponsored by

Cite this work

Researchers should cite this work as follows:

  • Suresh V. Garimella (2006), "Thermal Microsystems for On-Chip Thermal Engineering,"

    BibTex | EndNote



EE Building, Room 118