Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
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This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Researchers should cite this work as follows:
Dragica Vasileska (2011), "Process Modeling," https://nanohub.org/resources/11909.