Dragica Vasileska Contributions on the nanoHUB
This resource belongs to the Dragica Vasileska Contributions on the nanoHUB group.
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Researchers should cite this work as follows:
Dragica Vasileska (2011), "Process Modeling," http://nanohub.org/resources/11909.