In This Series

1. Silvaco Athena - Part 1

   04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

   This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

2. Silvaco Athena - Part 2

   04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

   This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

3. Silvaco Athena - Part 3

   09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

   This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.