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[Pending] Towards Calibrating Stiffness, Force, and Displacement of SPMs (ON HOLD)

By Jason Clark

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Because there is a lack of ASTM measurement standards for the AFM, it is not clear which calibration method in the literature is most accurate. Because the accuracy of the atomic force microscope is unknown, it is difficult to develop predictable models. And due to repeatability issues, two AFMs that measure the same thing will likely return different results. This talk will describe our efforts to address these issues by using self-calibratable MEMS as an accurate, practical, and practical way to calibrate AFMs. Although MEMS suffer from similar calibration problems, we have discovered a way to calibrate MEMS by leveraging off of their sensitive electromechanical attributes. If time permits we will present an innovative large-deflection, multiple-degree-of-freedom piezoelectric manipulator for SPM and nanolithography.

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Researchers should cite this work as follows:

  • Jason Clark (2011), "Towards Calibrating Stiffness, Force, and Displacement of SPMs (ON HOLD),"

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Burton Morgan 121, Purdue University, West Lafayette, IN, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.