In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation

By Muhammad Alam

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

Published on

Abstract

As the future of Moore’s law of transistor scaling appears uncertain, Electronics is trying to reinvent itself by integrating non-CMOS devices such as electronic-nose, biosensors, MEMS/NEMS onto the traditional CMOS platform. Such technologies (e.g. Mote technology for environment sensing for Intel, Marisol technology for display from Qualcomm, DNA sensors from Ion Torrent, etc.) have the potential to transform classical electronics by making it relevant to broader range of applications than classical CMOS-platform itself could address.

Among these various enabling devices, the Micro-electromechanical (MEMS) switches have potential applications in communication (e.g., RF-MEMS switches), in computation for sub 60 mV/dec switching (e.g., NEM-relay), in adaptive optics for mirrors, passive color displays (e.g., Marisol technology), and active cantilever based biosensors with sensitivity beyond the thermodynamic limit. This class of ‘phase-change’ switches is fundamentally different and offers many functionalities inaccessible to classical transistors. And yet, this exciting technology remains stymied by reliability concerns (e.g., stiction, dielectric charging, and salt penetration), high actuation voltage and power-dissipation related to intrinsic hysteresis and pull-in characteristics, and inability to tailor travel-range arbitrarily for various applications. In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a conversation regarding the viability of the approaches suggested and see if the perspective offered is realistic and relevant.

Bio

Professor Alam teaches Electrical Engineering at Purdue University, where his research focuses on the physics, simulation, characterization and technology of classical and novel semiconductor devices. From 1995 to 2001, he was with Bell Laboratories, Murray Hill, NJ, as a Member of Technical Staff in the Silicon ULSI Research Department. From 2001 to 2003, he was a Distinguished Member of Technical Staff at Agere Systems, Murray Hill, NJ. He joined Purdue University in 2004. Dr. Alam has published over 100 papers in international journals and has presented many invited and contributed talks at international conferences. He is a fellow of IEEE, APS, and AAAS, and recipient of 2006 IEEE Kiyo Tomiyasu Award for contributions to device technology for communication systems.

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Cite this work

Researchers should cite this work as follows:

  • Muhammad Alam (2012), "In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation," http://nanohub.org/resources/13899.

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Time

Location

Burton Morgan 121, Purdue University, West Lafayette, IN

Tags

In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation
  • In Search of a Better MEMS Switch How nanostructured dielectrics soften landing, increase travel Range, and reduce Energy dissipation Muhammad A. Alam Ankit Jain, and Sambit Palit alam@purdue.edu 1. In Search of a Better MEMS Swi… 8.6666666666666661
    00:00/00:00
  • copyright 2012 2. copyright 2012 210.43333333333334
    00:00/00:00
  • ‘More than Moore’ Technologies 3. ‘More than Moore’ Technolo… 212.1
    00:00/00:00
  • MOSFET, MEMS, and ISFET 4. MOSFET, MEMS, and ISFET 337.06666666666666
    00:00/00:00
  • Applications of MEMS Switches 5. Applications of MEMS Switches 457.56666666666666
    00:00/00:00
  • Active and Passive Displays 6. Active and Passive Displays 618.4
    00:00/00:00
  • MEMS and Mirasol Display 7. MEMS and Mirasol Display 715.36666666666667
    00:00/00:00
  • Outline 8. Outline 767.5
    00:00/00:00
  • Mechanical model for cantilever movement 9. Mechanical model for cantileve… 804.5
    00:00/00:00
  • Many Puzzles of MEMS C-V 10. Many Puzzles of MEMS C-V 1042.1333333333334
    00:00/00:00
  • Asymmetry in Pull-in and Pull-out Voltages 11. Asymmetry in Pull-in and Pull-… 1164.6
    00:00/00:00
  • Energy Landscape of MEMS Transition 12. Energy Landscape of MEMS Trans… 1544.7333333333334
    00:00/00:00
  • MEMS, 1st order Phase Transition, Cusp Catastrophe 13. MEMS, 1st order Phase Transiti… 1729.8333333333333
    00:00/00:00
  • Is there a 2st order Phase Transition in MEMS? Physics of Bows and Arrows 14. Is there a 2st order Phase Tra… 1877.7333333333334
    00:00/00:00
  • Euler Buckling, 2st order Phase Transition, Fold Catastrophe 15. Euler Buckling, 2st order Phas… 2033.2
    00:00/00:00
  • Outline 16. Outline 2172.5666666666666
    00:00/00:00
  • Reliability: The problem of Hard Landing 17. Reliability: The problem of Ha… 2184.6666666666665
    00:00/00:00
  • Soft Landing by Resistive Braking 18. Soft Landing by Resistive Brak… 2280.6666666666665
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  • Operation: Geometry and Capacitance 19. Operation: Geometry and Capaci… 2386.5333333333333
    00:00/00:00
  • Soft Landing by Capacitive Braking 20. Soft Landing by Capacitive Bra… 2475.8333333333335
    00:00/00:00
  • Patterning is Widely used … 21. Patterning is Widely used … 2510.6
    00:00/00:00
  • Outline 22. Outline 2548.1666666666665
    00:00/00:00
  • Charge Controlled Arbitrary Travel Range 23. Charge Controlled Arbitrary Tr… 2590.8666666666668
    00:00/00:00
  • Manipulating stability point: Sculpting the Electrode 24. Manipulating stability point: … 2719.4666666666667
    00:00/00:00
  • Manipulating stability point: Fractal Sculpting of the Electrode 25. Manipulating stability point: … 2815.6333333333332
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  • Taylor, soup bubble and cloud formation 26. Taylor, soup bubble and cloud … 2882.4333333333334
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  • Outline 27. Outline 3033.1
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  • Hysteresis and Power Dissipation 28. Hysteresis and Power Dissipati… 3064.5666666666666
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  • Origin of Hysteresis Loss 29. Origin of Hysteresis Loss 3163.7333333333331
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  • Hysteresis-free geometry with minimum dissipation 30. Hysteresis-free geometry with … 3305.9666666666667
    00:00/00:00
  • Conclusions: MEMS & Nanostructured Electrodes 31. Conclusions: MEMS & Nanostruct… 3359.0333333333333
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  • Conclusions: Future of CMOS+ Technology 32. Conclusions: Future of CMOS+ T… 3465.8333333333335
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  • Conclusions: MEMS & Nanostructured Electrodes 33. Conclusions: MEMS & Nanostruct… 4272.2333333333336
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