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[Illinois] Advanced Materials Characterization Workshop 2012: Tutorial 5: Secondary Ion Mass Spectrometry/Rutherford Backscattering

By Timothy P. Spila

Research Scientist in Materials Characterization, University of Illinois at Urbana-Champaign, Urbana, IL

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(Audio improves considerably at 0:26) Secondary ion mass spectrometry is an analytical technique based on the measurement of themass of ions ejected from a solid surface after the surface has been bombarded with high energy (1-25 keV) primary ions.


An ongoing interest in both the fundamental understanding of materials and in the development of the next generation of microelectronic devices is the measurement and understanding of the morphological evolution of surfaces and interfaces of thin films. For this purpose, it is necessary to develop and exploit new techniques to examine the fundamental processes that occur at these interfaces.


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Engineering Sciences Building, University of Illinois at Urbana-Champaign, Urbana, IL


NanoBio Node, Charlie Newman, Obaid Sarvana, AbderRahman N Sobh

University of Illinois at Urbana-Champaign

Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.