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[Illinois] Advanced Materials Characterization Workshop 2012: Tutorial 5: Secondary Ion Mass Spectrometry/Rutherford Backscattering

By Timothy P. Spila

Research Scientist in Materials Characterization, University of Illinois at Urbana-Champaign, Urbana, IL

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Licensed according to this deed., a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.