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[Illinois] Advanced Materials Characterization Workshop 2012: Tutorial 3: X-ray Electron Spectroscopy / Auger Electron Spectroscopy

By Rick Haasch

FS-MRL, University of Illinois at Urbana-Champaign, Urbana, IL

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Abstract


This workshop provides a critical, comparative and condensed overview of mainstream analytical techniques for materials characterization with emphasis on practical applications. The workshop will cover the following techniques: Atomic force microscopy (AFM) X-ray diffraction, reflectivity and fluorescence (XRD, XRR, XRF) including high-temperature analysis Scanning and transmission electron microscopy (SEM, TEM, STEM); focused ion beam (FIB) Auger electron spectroscopy (AES), and x-ray photoelectron spectroscopy (XPS) Secondary ion mass spectrometry (SIMS), and Rutherford backscattering (RBS) Optical spectroscopy (Raman, Photoluminescence, FTIR, ellipsometry, etc.) Optical microscopy (confocal microscopy, near-field scanning optical microscopy, Raman microscopy, etc.) Nanoindentation analysis (including nano electric contact resistance, acoustic emission, and nano dynamical mechanical analysis). Biological materials: tutorial on sample prep and analysis of biological material.

Bio

Dr. Rick Haasch is a Senior Research Scientist at the Frederick Seitz Materials Research Laboratory at the University of Illinois and Group Leader of the Surface Analysis section which includes two SIMS instruments, two MeV ion accelerators, two XPS instruments and a scanning Auger system.

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Cite this work

Researchers should cite this work as follows:

  • Rick Haasch (2012), "[Illinois] Advanced Materials Characterization Workshop 2012: Tutorial 3: X-ray Electron Spectroscopy / Auger Electron Spectroscopy," http://nanohub.org/resources/14470.

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Time

Location

Engineering Sciences Building, University of Illinois at Urbana-Champaign, Urbana, IL

Submitter

NanoBio Node, Charlie Newman, Obaid Sarvana, AbderRahman N Sobh

University of Illinois at Urbana-Champaign

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