ECE 695A Reliability Physics of Nanotransistors

By Muhammad Alam

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Abstract

This course will focus on the physics of reliability of small semiconductor devices. In traditional courses on device physics, the students learn how to compute current through a device when a voltage is applied. However, as transistors are turned on and off trillions of times during the years of the operation, gradually defects accumulate within the device so that at some point the transistor does not work anymore. The course will explore the physics and mathematics regarding how and when things break – a topic of great interest to semiconductor industry.

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Cite this work

Researchers should cite this work as follows:

  • Muhammad Alam (2013), "ECE 695A Reliability Physics of Nanotransistors," https://nanohub.org/resources/16560.

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Location

EE 226, Purdue University, West Lafayette, IN

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Lecture Number/Topic Online Lecture Video Lecture Notes Supplemental Material Suggested Exercises
ECE 695A Lecture 1: Reliability of Nanoelectronic Devices View HTML
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ECE 695A Lecture 2: A Brief History of Reliability and Types of Reliability Models View HTML
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ECE 695A Lecture 3: Reliability as a Threshold Problem View HTML
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ECE 695A Lecture 4: Structures and Defects in Crystals View HTML
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ECE 695A Lecture 5: Amorphous Material/Interfaces View HTML
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ECE 695A Lecture 5R: Review Questions View HTML
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ECE 695A Lecture 6: Defects in the Bulk and at Interfaces View HTML
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ECE 695A Lecture 7: Trapping in Pre-existing Traps View HTML
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ECE 695A Lecture 7A: Appendix - Theory of Stochastic Distribution View HTML
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ECE 695A Lecture 7R: Review Questions View HTML
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ECE 695A Lecture 8: Phenomenological Observations for NBTI View HTML
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ECE 695A Lecture 8R: Review Questions View HTML
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ECE 695A Lecture 9: NBTI Time Dependence -- Stress Phase View HTML
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ECE 695A Lecture 10: NBTI Time Dependence -- Frequency and Duty Cycle Dependencies View HTML
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ECE 695A Lecture 10A: Appendix - Reflection on R-D Equation View HTML
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ECE 695A Lecture 11: Temperature Dependence of NBTI View HTML
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ECE 695A Lecture 12: Field Dependence of NBTI View HTML
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ECE 695A Lecture 12R: Review Questions View HTML
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ECE 695A Lecture 13: Introductory Lecture on HCI Degradation View HTML
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ECE 695A Lecture 13R: Review Questions View HTML
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ECE 695A Lecture 14a: Voltage Dependent HCI I View HTML
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ECE 695A Lecture 14b: Voltage Dependent HCI II View HTML
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ECE 695A Lecture 14R: Review Questions View HTML
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ECE 695A Lecture 15: Off-state HCI Degradation View HTML
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ECE 695A Lecture 16: Temperature Dependence of HCI View HTML
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ECE 695A Lecture 16: Review Questions View HTML
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ECE 695A Lecture 17: Subthreshold and Idlin Methods View HTML
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ECE 695A Lecture 17R: Review Questions View HTML
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ECE 695A Lecture 18: DC-IV and Charge Pumping Methods View HTML
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ECE 695A Lecture 18R: Review Questions View HTML
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ECE 695A Lecture 19: Spin-Dependent Recombination and Electrically Detected Magnetic Resonance View HTML
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ECE 695A Lecture 19R: Review Questions View HTML
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ECE 695A Lecture 20: Reliability Measurements Notes (pdf)
To be recorded at a later date.

ECE 695A Lecture 21: Introduction to Dielectric Breakdown View HTML
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ECE 695A Lecture 21R: Review Questions View HTML
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ECE 695A Lecture 22: Voltage Dependence of Thin Dielectric Breakdown View HTML
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ECE 695A Lecture 22R: Review Questions View HTML
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ECE 695A Lecture 23: Characterization of Defects Responsible for TDDB View HTML
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ECE 695A Lecture 23R: Review Questions View HTML
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ECE 695A Lecture 24: Statistics of Oxide Breakdown - Cell percolation model View HTML
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ECE 695A Lecture 24R: Review Questions View HTML
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ECE 695A Lecture 25: Theory of Soft and Hard Breakdown View HTML
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ECE 695A Lecture 25R: Review Questions View HTML
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ECE 695A Lecture 26-1: Statistics of Soft Breakdown via Methods of Markov Chains View HTML
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ECE 695A Lecture 26-2: Statistics of Soft Breakdown (Breakdown Position correlation) View HTML
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ECE 695A Lecture 26R: Review Questions View HTML
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ECE 695A Lecture 27: Correlated TDDB in Off-State HCI View HTML
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ECE 695A Lecture 27R: Review Questions View HTML
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ECE 695A Lecture 28: Circuit Implications of Dielectric Breakdown View HTML
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ECE 695A Lecture 29: Breakdown of Thick Dielectrics View HTML
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ECE 695A Lecture 29A: Appendix - Dimension of a Surface View HTML
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ECE 695A Lecture 29R: Review Questions View HTML
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ECE 695A Lecture 30: Breakdown in Dielectrics with Defects View HTML
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ECE 695A Lecture 30R: Review Questions View HTML
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ECE 695A Lecture 31: Collecting and Plotting Data View HTML
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ECE 695A Lecture 31A: Appendix - Bootstrap Method Introduction View HTML
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ECE 695A Lecture 31R: Review Questions View HTML
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ECE 695A Lecture 32: Physical vs. Empirical Distribution View HTML
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ECE 695A Lecture 32R: Review Questions View HTML
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ECE 695A Lecture 33: Model Selection/Goodness of Fit View HTML
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ECE 695A Lecture 33R: Review Questions View HTML
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ECE 695A Lecture 34: Scaling Theory of Design of Experiments View HTML
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ECE 695A Lecture 34A: Appendix - Variability by Bootstrap Method View HTML
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ECE 695A Lecture 35: Design of Experiments View HTML
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ECE 695A Lecture 35R: Review Questions View HTML
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ECE 695A Lecture 37: Radiation Induced Damage – An overview View HTML
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ECE 695A Lecture 37R: Review Questions View HTML
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ECE 695A Lecture 38: Charge Generation by Particles View HTML
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ECE 695A Lecture 38R: Review Questions View HTML
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ECE 695A Lecture 39-1: Radiation and Devices I View HTML
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ECE 695A Lecture 39-1R: Review Questions View HTML
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ECE 695A Lecture 40: Failure Analysis and Epilogue View HTML
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