Carbon nanotubes are being researched extensively for their unique conductive properties. Controlled growth of vertical single-walled carbon nanotubes, however, has not yet been possible. This presentation reports a way to synthesize vertical single-walled carbon nanotubes that can be used for device integration. It also describes a method to establish contact to the carbon nanotubes. The carbon nanotubes are created using a modified form of a porous anodic alumina template with an iron catalyst layer incorporated into the pore cell walls. Microwave plasma-enhanced chemical vapor deposition is then used to generate the carbon nanotubes. Palladium is used in an electrodeposition process in order to establish top and bottom contacts to the carbon nanotubes. A titanium layer is deposited beneath the anodized film and acts as a working electrode, allowing palladium nanowires to form and contact the carbon nanotubes at the bottom. Continued deposition yields palladium nanoclusters which contact the top of the carbon nanotube. Cyclic voltammetry (CV) is run on several different locations of the template. Using the information it provides, CV curves are created. These curves taken are then compared. Information that is useful is then extracted from these curves in order to determine how to control the deposition of the nanoclusters that form on the top of the carbon nanotubes.
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