MSE 376 Lecture 1: Film Deposition Methods

By Mark C. Hersam

Department of Materials Science and Engineering, Northwestern University, Evanston, IL

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Researchers should cite this work as follows:

  • Mark C. Hersam (2006), "MSE 376 Lecture 1: Film Deposition Methods," http://nanohub.org/resources/1872.

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Northwestern University, Evanston, IL

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