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MSE 376 Lecture 1: Film Deposition Methods

By Mark Hersam

Northwestern University

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Abstract  
Cite this work

Researchers should cite this work as follows:

  • Mark Hersam (2006), "MSE 376 Lecture 1: Film Deposition Methods," http://nanohub.org/resources/1872.

    BibTex | EndNote

Time April 01, 2005
Location Northwestern University, Evanston, IL
Tags
  1. atomic layer deposition
  2. course lecture
  3. material science
  4. materials

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