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MSE 376 Lecture 1: Film Deposition Methods

By Mark Hersam

Northwestern University

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Researchers should cite this work as follows:

  • Mark Hersam (2006), "MSE 376 Lecture 1: Film Deposition Methods," https://nanohub.org/resources/1872.

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Northwestern University, Evanston, IL

Tags

  1. atomic layer deposition
  2. course lecture
  3. materials
  4. material science

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