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Process Lab : Oxidation Flux

By Shuqing (Victor) Cao, Yang Liu, Peter Griffin

Stanford University

Integrated Circuit Fabrication Process Simulation : Oxidation Flux

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Version 1 - published on 22 Sep 2006

doi:10254/nanohub-r1880.1 cite this

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Process Lab: Oxidation

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(PDF, 95.36 Kb) Theory and Models

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