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By Shuqing (Victor) Cao1, Yang Liu1, Peter Griffin1
1. Stanford University
This tool simulates dopant diffusion coupled with point defects.
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Version 1.0 - published on 22 Aug 2014
doi:10.4231/D3Q814T06 cite this
This tool is closed source.
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19 Jan 2007
3.0 out of 5 stars
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