Process Lab: Defect-coupled diffusion

By Shuqing (Victor) Cao1, Yang Liu1, Peter Griffin1

1. Stanford University

This tool simulates dopant diffusion coupled with point defects.

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Version 1.0 - published on 22 Aug 2014

doi:10.4231/D3Q814T06 cite this

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    Yaswanth Rangineni

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