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Avg. Review: 3.0 out of 5 stars
Citations: 1
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Process Lab : Defect-coupled diffusion

By Shuqing (Victor) Cao, Yang Liu, Peter Griffin

Stanford University

Integrated Circuit Fabrication Process Simulation : Simulates dopant diffusion coupled with point defects

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Version 1 - published on 26 Sep 2006

doi:10254/nanohub-r1882.1 cite this

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  1. 3.0 out of 5 stars

    Yaswanth Rangineni

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