Basic Semiconductor IC fabrication steps.
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This animation shows the various steps that are involved in semiconductor IC fabrication. The processes are shown on a single block of silicon substrate although the real process is done on a large silicon wafer.
Fundamentals of Semiconductor Fabrication by Gary.S.May, Simon.M.Sze. Pages-12,13,14
Researchers should cite this work as follows:
Sudhaman Parthasarathi (2013), "Basic Semiconductor IC fabrication steps.," https://nanohub.org/resources/19562.