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Uniaxial and Biaxial Stress/Strain Calculator for Semiconductors

By Jamie Teherani

Massachusetts Institute of Technology (MIT)

Simulate stress or strain along user-defined Miller directions for arbitrary stress/strain configurations.

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Version 1.1 - published on 17 Jan 2014

doi:10.4231/D33F4KN4J cite this

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Due to the Poisson effect, straining the material along a certain direction causes strains along other directions. The crystalline nature of semiconductors causes the elastic matrix (which determines the relation between stress and strain) to be anisotropic. Said differently, different crystalline axes require more or less stress to achieve a specific strain. This calculator allows you to calculate the strain and stress tensor for adjustable boundary conditions. These boundary conditions can be a fixed stress or fixed strain along one or more of the user-defined axes. The calculations assume elastic deformation implying a linear relation between stress and strain. A couple of notes on the stress/strain relationships: epsilon_6 := 2*epsilon_1,2 as we use [ engineering shear strain] in the simulation, but sigma_6 := sigma_1,2



Jamie Teherani, MIT 2014

Sponsored by

NSF Center for Energy Efficient Electronics Science,

Cite this work

Researchers should cite this work as follows:

  • Jamie Teherani (2014), "Uniaxial and Biaxial Stress/Strain Calculator for Semiconductors," (DOI: 10.4231/D33F4KN4J).

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