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Local Anodic Oxidation

By Sitaram R Natekar

Purdue University

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Animations

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Abstract

Video describing a typical Local Anodic Oxidation process and some data trends showing how certain parameters influence oxide height on a specimen of Gallium Arsenide

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Researchers should cite this work as follows:

  • Sitaram R Natekar (2014), "Local Anodic Oxidation," http://nanohub.org/resources/20658.

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