Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
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1. Design and Compact Modeling of…
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2. Outline
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3. Motivation: Frequency Sources
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4. To Integrate or Not to Integra…
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5. Toward monolithic frequency so…
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6. CMOS-friendly resonator transd…
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7. CMOS-friendly resonator transd…
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8. Solid-State MEMS in CMOS
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9. Development Flow for Complex S…
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10. The Three Compact Models Devel…
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11. The Three Compact Models Devel…
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12. "Nano-Engineered Electronic De…
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13. The Three Compact Models Devel…
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14. The Three Compact Model Develo…
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15. RBT Design and fabrication
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16. FET Sensing for Multi-GHz Reso…
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17. 1st Generation CMOS RBTs (IBM …
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18. 1st Generation CMOS RBTs (IBM …
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19. BEOL Materials for Enhanced Ve…
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20. BEOL Phononic Crystals
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21. BEOL PnC Design
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22. 2nd Generation CMOS-integrated…
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23. Sensing FET DC Characteristics
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24. RF Characterization Results
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25. Effect of Z-direction Uniformi…
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26. FEM Simulation
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27. Vertical Confinement
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28. Design and Fabrication Conclus…
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29. RBT modeling
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30. Bulk-Mode Bar Resonator
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31. Physical Device Implementation
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32. Coupled Physics
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33. Why M & T Nodes?
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34. Electrostatic Drive Physics
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35. Mechanical Body Model
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36. Mechanical Body Model (II)
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37. Thermal Model
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38. CapDrive VerilogA (Nodes and P…
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39. CapDrive VerilogA (core)
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40. Resonant Body VerilogA (Parame…
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41. Resonant Body VerilogA (core)
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42. Thermal Module
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43. Resonator Schematic
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44. Simulation Results
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45. Harmonics
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46. CapDrive N Harmonics
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47. CapDrive N Harmonics
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48. Simulation with Harmonics
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49. Resonant Body Transistor
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50. Acoustic Impedance of ABRs
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51. Horizontal FET Sensing
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52. FET Sensing Model
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53. Modifications to BSIM
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54. Modifications to BSIM
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55. Modifications to BSIM
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56. RBT model
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57. RBT Model Simulation
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58. Future Work
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