Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors

By Dana Weinstein1; Luca Daniel1; Bichoy W. Bahr2

1. Electrical Engineering and Computer Science, Massachusetts Institute of Technology (MIT), Cambridge, MA 2. HybridMEMS Group, Massachusetts Institute of Technology (MIT), Cambridge, MA

View Presentation

Additional materials available (4)

Category

Online Presentations

Published on

Abstract

This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes. Both the experimental work on the device (funded by the Global Research Corporation) and the compact modeling of the device (funded by NSF and SRC throug h the NEEDS initiative) are discussed.

Sponsored by

NEEDS: Nano-Engineered Electronic Device Simulation Node

Cite this work

Researchers should cite this work as follows:

  • Dana Weinstein, Luca Daniel, Bichoy W. Bahr (2014), "Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors," https://nanohub.org/resources/21097.

    BibTex | EndNote

Time

Tags

  1. CMOS
  2. Nano Electro-Mechanical Systems (NEMS)
  3. NCN Group - NEMS/MEMS
  4. NEEDS node
  5. NEMS/MEMS
  6. resonant body transistor (RBT)
  7. RF MEMS
Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
  • Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors 1. Design and Compact Modeling of… 0
    00:00/00:00
  • Outline 2. Outline 9.6763430096763425
    00:00/00:00
  • Motivation: Frequency Sources 3. Motivation: Frequency Sources 65.69903236569904
    00:00/00:00
  • To Integrate or Not to Integrate… 4. To Integrate or Not to Integra… 101.06773440106774
    00:00/00:00
  • Toward monolithic frequency sources 5. Toward monolithic frequency so… 267.36736736736736
    00:00/00:00
  • CMOS-friendly resonator transduction 6. CMOS-friendly resonator transd… 443.07640974307645
    00:00/00:00
  • CMOS-friendly resonator transduction 7. CMOS-friendly resonator transd… 462.92959626292964
    00:00/00:00
  • Solid-State MEMS in CMOS 8. Solid-State MEMS in CMOS 545.34534534534532
    00:00/00:00
  • Development Flow for Complex Systems with 9. Development Flow for Complex S… 612.57924591257927
    00:00/00:00
  • The Three Compact Models Development Stages Stage 1: Physics-Based Modeling 10. The Three Compact Models Devel… 707.60760760760763
    00:00/00:00
  • The Three Compact Models Development Stages Stage 1: Physics-Based Modeling 11. The Three Compact Models Devel… 741.307974641308
    00:00/00:00
  • 12. "Nano-Engineered Electronic De… 783.75041708375045
    00:00/00:00
  • The Three Compact Models Developent Stages Stage 2: Model Order Reduction from PDE Solvers 13. The Three Compact Models Devel… 851.685018351685
    00:00/00:00
  • The Three Compact Model Development Stages Stage 3: Modeling Calibration to Measured Data 14. The Three Compact Model Develo… 882.21554888221556
    00:00/00:00
  • RBT Design and fabrication 15. RBT Design and fabrication 920.12012012012019
    00:00/00:00
  • FET Sensing for Multi-GHz Resonators 16. FET Sensing for Multi-GHz Reso… 930.36369703036371
    00:00/00:00
  • 1st Generation CMOS RBTs (IBM 32SOI) 17. 1st Generation CMOS RBTs (IBM … 1022.3890557223891
    00:00/00:00
  • 1st Generation CMOS RBTs (IBM 32SOI) 18. 1st Generation CMOS RBTs (IBM … 1145.2118785452119
    00:00/00:00
  • BEOL Materials for Enhanced Vertical Confinement 19. BEOL Materials for Enhanced Ve… 1234.8014681348016
    00:00/00:00
  • BEOL Phononic Crystals 20. BEOL Phononic Crystals 1347.9145812479146
    00:00/00:00
  • BEOL PnC Design 21. BEOL PnC Design 1423.1564898231566
    00:00/00:00
  • 2nd Generation CMOS-integrated RBTs (IBM32SOI) 22. 2nd Generation CMOS-integrated… 1453.8538538538539
    00:00/00:00
  • Sensing FET DC Characteristics 23. Sensing FET DC Characteristics 1528.7287287287288
    00:00/00:00
  • RF Characterization Results 24. RF Characterization Results 1549.5829162495829
    00:00/00:00
  • Effect of Z-direction Uniformity 25. Effect of Z-direction Uniformi… 1582.8495161828496
    00:00/00:00
  • FEM Simulation 26. FEM Simulation 1664.7647647647648
    00:00/00:00
  • Vertical Confinement 27. Vertical Confinement 1731.7984651317986
    00:00/00:00
  • Design and Fabrication Conclusion 28. Design and Fabrication Conclus… 1899.2325658992327
    00:00/00:00
  • RBT modeling 29. RBT modeling 2021.3546880213548
    00:00/00:00
  • Bulk-Mode Bar Resonator 30. Bulk-Mode Bar Resonator 2032.8661995328662
    00:00/00:00
  • Physical Device Implementation 31. Physical Device Implementation 2163.22989656323
    00:00/00:00
  • Coupled Physics 32. Coupled Physics 2181.3146479813149
    00:00/00:00
  • Why M & T Nodes? 33. Why M & T Nodes? 2284.7180513847184
    00:00/00:00
  • Electrostatic Drive Physics 34. Electrostatic Drive Physics 2390.156823490157
    00:00/00:00
  • Mechanical Body Model 35. Mechanical Body Model 2450.5505505505507
    00:00/00:00
  • Mechanical Body Model (II) 36. Mechanical Body Model (II) 2500.6006006006005
    00:00/00:00
  • Thermal Model 37. Thermal Model 2576.4431097764432
    00:00/00:00
  • CapDrive VerilogA (Nodes and Parameters) 38. CapDrive VerilogA (Nodes and P… 2597.4307640974307
    00:00/00:00
  • CapDrive VerilogA (core) 39. CapDrive VerilogA (core) 2618.9522856189524
    00:00/00:00
  • Resonant Body VerilogA (Parameters) 40. Resonant Body VerilogA (Parame… 2679.3460126793461
    00:00/00:00
  • Resonant Body VerilogA (core) 41. Resonant Body VerilogA (core) 2712.0787454120787
    00:00/00:00
  • Thermal Module 42. Thermal Module 2724.8915582248915
    00:00/00:00
  • Resonator Schematic 43. Resonator Schematic 2745.378712045379
    00:00/00:00
  • Simulation Results 44. Simulation Results 2792.4591257924594
    00:00/00:00
  • Harmonics 45. Harmonics 2830.830830830831
    00:00/00:00
  • CapDrive N Harmonics 46. CapDrive N Harmonics 2856.9569569569571
    00:00/00:00
  • CapDrive N Harmonics 47. CapDrive N Harmonics 2889.1891891891892
    00:00/00:00
  • Simulation with Harmonics 48. Simulation with Harmonics 2918.8855522188856
    00:00/00:00
  • Resonant Body Transistor 49. Resonant Body Transistor 2993.0930930930931
    00:00/00:00
  • Acoustic Impedance of ABRs 50. Acoustic Impedance of ABRs 3054.5211878545215
    00:00/00:00
  • Horizontal FET Sensing 51. Horizontal FET Sensing 3111.344678011345
    00:00/00:00
  • FET Sensing Model 52. FET Sensing Model 3146.1461461461463
    00:00/00:00
  • Modifications to BSIM 53. Modifications to BSIM 3206.53987320654
    00:00/00:00
  • Modifications to BSIM 54. Modifications to BSIM 3271.6049382716051
    00:00/00:00
  • Modifications to BSIM 55. Modifications to BSIM 3279.7464130797466
    00:00/00:00
  • RBT model 56. RBT model 3286.5532198865535
    00:00/00:00
  • RBT Model Simulation 57. RBT Model Simulation 3306.3396730063396
    00:00/00:00
  • Future Work 58. Future Work 3314.5478812145479
    00:00/00:00
Pop Out