The probe is integrated to several commercial AFM systems for imaging and material characterization experiments. Tapping mode images using FIRAT probes with resonance frequencies in the 600-900 kHz range with 60 Hz line scan rate are obtained, where the electrostatic actuator is used for both AC vibration and Z position control. In addition to regular tapping mode imaging, the broad bandwidth of the probe enables non-resonant tapping mode imaging where the transient interaction forces can be measured with regular imaging speeds. When used in the time resolved interaction force (TRIF) mode, the FIRAT probe provides quantitative information such as surface adhesion and elasticity through model based inversion, while simultaneously imaging the topography. TRIF mode images and inversion results on various polymer and carbon nanotube samples are presented. FIRAT probe design and fabrication for specific applications for operation in air are also discussed. Fabricated probes have resonance frequencies about 1MHz, quality factors in the .5 to 16, spring constants in the 10-40 N/m range. Finally, FIRAT probes for applications in liquids are described and initial single molecule force spectroscopy results are presented.
- A.G. Onaran, M. Balantekin, W. Lee, W.L. Hughes, B.A. Buchine, R.O. Guldiken, Z. Parlak, C.F. Quate and F.L. Degertekin, “A new atomic force microscope probe with force sensing integrated readout and active tip,” Review of Scientific Instruments, 77, 023501, 2006.
- W. Lee, N. A. Hall, Z. Zhou, and F. L. Degertekin, “Fabrication and Characterization of a Micromachined Acoustic Sensor with Integrated Optical Readout,” IEEE J. Selected Topics on Quantum Electronics, 10, pp. 643-51, 2004.
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