[Illinois] An Introduction to Scanning Electron Microscopy and Focused Ion Beam

By Matthew Bresin

University of Illinois at Urbana-Champaign

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Researchers should cite this work as follows:

  • Matthew Bresin (2015), "[Illinois] An Introduction to Scanning Electron Microscopy and Focused Ion Beam," http://nanohub.org/resources/22625.

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NanoBio Node, Aly Taha

University of Illinois at Urbana-Champaign

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