NanoCraft-FIBstream: Focused Ion Beam Stream File Generator

By Ran Cui1; Mikhail Shalaginov1; Alexander V. Kildishev1

1. Purdue University

Generate a stream file for milling nanostructures (e.g. rectangular and circular nanohole arrays, v-groove slots ) by using focused ion beam (e.g. FEI Nova 200).

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Version 1.0 - published on 06 Feb 2017

doi:10.4231/D3DN3ZX26 cite this

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